Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structure

Goux, LudovicLudovicGouxRusso, G.G.RussoLisoni, JuditJuditLisoniSchwitters, MichaelMichaelSchwittersParaschiv, VasileVasileParaschivMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersZambrano, R.R.Zambrano2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10519Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structureOral presentation