De Gendt, StefanStefanDe GendtAdelmann, ChristophChristophAdelmannDelabie, AnneliesAnneliesDelabieNyns, LauraLauraNynsPourtois, GeoffreyGeoffreyPourtoisVan Elshocht, SvenSvenVan Elshocht2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13598Replacing SiO2 - Material and processing aspects of new dielectricsMeeting abstract