Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEM

Hueging, N.N.HuegingLuysberg, M.M.LuysbergUrban, K.K.UrbanBuca, D.D.BucaHolländer, B.B.HolländerMantl, S.S.MantlMorschbacher, M.M.MorschbacherFichner, P.F.P.P.F.P.FichnerLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9074Dislocation nucleation and movement in helium implanted SiGe/Si(001)Heterostructures studied by in-situ TEMOral presentation