Vohra, AnuragAnuragVohraLoo, RogerRogerLooKohen, DavidDavidKohenMargetis, JoeJoeMargetisTolle, JohnJohnTolleStange, DanielaDanielaStangeBuca, DanDanBucaVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016-11https://imec-publications.be/handle/20.500.12860/27556Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6Meeting abstract