Bekaert, JoostJoostBekaertDi Lorenzo, PaoloPaoloDi LorenzoMao, MingMingMaoDecoster, StefanStefanDecosterLariviere, StephaneStephaneLariviereFranke, Joern-HolgerJoern-HolgerFrankeBlanco, VictorVictorBlancoKutrzeba Kotowska, BogumilaBogumilaKutrzeba KotowskaLazzarino, FredericFredericLazzarinoGallagher, EmilyEmilyGallagherHendrickx, EricEricHendrickxLeray, PhilippePhilippeLerayKim, Ryan Ryoung hanRyan Ryoung hanKimMcIntyre, GregGregMcIntyreColsters, PaulPaulColstersWittebrood, FrisoFrisoWittebroodvan Dijk, JoepJoepvan DijkMaslow, MarkMarkMaslowTimoshkov, VadimVadimTimoshkovKiers, TonTonKiers2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27819SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platformProceedings paperhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10143/1/SAQP-and-EUV-block-patterning-of-BEOL-metal-layers-on/