XPS study of ion induced oxidation of silicon with and without oxygen flooding

De Witte, HildeHildeDe WitteConard, ThierryThierryConardSporken, R.R.SporkenGouttebaron, R.R.GouttebaronMagnée, R.R.MagnéeVandervorst, WilfriedWilfriedVandervorstCaudano, R.R.CaudanoGijbels, RenaatRenaatGijbels2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4285XPS study of ion induced oxidation of silicon with and without oxygen floodingProceedings paper