Test structure to investigate the series resistance components of source/drain structure

Biesemans, SergeSergeBiesemansKubicek, StefanStefanKubicekDe Meyer, KristinKristinDe Meyer2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1740Test structure to investigate the series resistance components of source/drain structureJournal article