Photocatalytic lithography with atomic layer deposited TiO2 films to tailor biointerface properties

Vandenbroucke, SofieSofieVandenbrouckeMattelaer, FelixFelixMattelaerJans, KarolienKarolienJansDetavernier, ChristopheChristopheDetavernierStakenborg, TimTimStakenborgVos, RitaRitaVos2021-10-272021-10-2720192196-7350https://imec-publications.be/handle/20.500.12860/34292Photocatalytic lithography with atomic layer deposited TiO2 films to tailor biointerface propertiesJournal articlehttps://doi.org/10.1002/admi.201900035