Groeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeveNigam, TanyaTanyaNigamKaczer, BenBenKaczerMaes, HermanHermanMaes2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3476Reliability of ultra-thin oxides for the giga-bit generationsProceedings paper