Transfer of a thin silicon film onto a ceramic substrate

Solanki, Chetan SinghChetan SinghSolankiBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmansNijs, JohanJohanNijs2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5668Transfer of a thin silicon film onto a ceramic substrateOral presentation