CMP of novel materials for frontend-of-line and backend-of-line applications

Leunissen, PeterPeterLeunissenOng, PatrickPatrickOngTeugels, LieveLieveTeugels2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19289CMP of novel materials for frontend-of-line and backend-of-line applicationsOral presentation