Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films

Filatova, E.O.E.O.FilatovaKozhevnikov, I.V.I.V.KozhevnikovSokolov, A.A.A.A.SokolovKonashuk, A.S.A.S.KonashukSchaefers, F.F.SchaefersPopovici, Mihaela IoanaMihaela IoanaPopoviciAfanasiev, ValeriValeriAfanasiev2021-10-222021-10-2220140368-2048https://imec-publications.be/handle/20.500.12860/23813Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy filmsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0368204814000395