Yakimets, DmitryDmitryYakimetsHuynh Bao, TrongTrongHuynh BaoGarcia Bardon, MarieMarieGarcia BardonDehan, MorinMorinDehanCollaert, NadineNadineCollaertMercha, AbdelkarimAbdelkarimMerchaTokei, ZsoltZsoltTokeiThean, AaronAaronTheanVerkest, DiederikDiederikVerkestDe Meyer, KristinKristinDe Meyer2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24856Lateral versus vertical gate-all-around FETs for beyond 7nm technologiesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6872333&contentType=Conference+Publications