AlGaN-on-Si backside illuminated photodetectors for the extreme ultraviolet (EUV) range

Malinowski, PawelPawelMalinowskiDuboz, Jean-YvesJean-YvesDubozJohn, JoachimJoachimJohnSturdevant, CharlesCharlesSturdevantDas, JoJoDasDerluyn, JoffJoffDerluynGermain, MarianneMarianneGermainDe Moor, PietPietDe MoorMinoglou, KikiKikiMinoglouSemond, FabriceFabriceSemondFrayssinet, EricEricFrayssinetHochedez, Jean-FrancoisJean-FrancoisHochedezGiordanengo, BorisBorisGiordanengoVan Hoof, ChrisChrisVan HoofMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17560AlGaN-on-Si backside illuminated photodetectors for the extreme ultraviolet (EUV) rangeProceedings paper