CMOS-integrated digitally controlled DC-DC voltage converter with voltage and time configurations for on-chip high voltage MEMS switch actuation

Ghannam, MoustafaMoustafaGhannamAdly, I.I.AdlyTilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe RaedtMertens, RobertRobertMertens2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8956CMOS-integrated digitally controlled DC-DC voltage converter with voltage and time configurations for on-chip high voltage MEMS switch actuationProceedings paper