Lorusso, GianGianLorussoHoriguchi, NaotoNaotoHoriguchiBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonVan den Bosch, GeertGeertVan den BoschKar, Gouri SankarGouri SankarKarOhashi, TakeyoshiTakeyoshiOhashiSutani, TakumichiTakumichiSutaniWatanabe, RyotaRyotaWatanabeTakemasa, YoshikataYoshikataTakemasaIkota, MasamiMasamiIkota2021-10-272021-10-2720190021-4922https://imec-publications.be/handle/20.500.12860/33477Electron beam metrology for advanced technology nodesJournal articlehttps://doi.org/10.7567/1347-4065/ab1475