Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared

Malik, AdityaAdityaMalikMuneeb, MuhammadMuhammadMuneebShimura, YosukeYosukeShimuraVan Campenhout, JorisJorisVan CampenhoutLoo, RogerRogerLooRoelkens, GuntherGuntherRoelkens2021-10-212021-10-212013-100003-6951https://imec-publications.be/handle/20.500.12860/22751Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infraredJournal articlehttp://dx.doi.org/10.1063/1.4826114