Sioncke, SonjaSonjaSionckeDelabie, AnneliesAnneliesDelabieBrammertz, GuyGuyBrammertzConard, ThierryThierryConardFranquet, AlexisAlexisFranquetCaymax, MattyMattyCaymaxUrbanczyk, AdamAdamUrbanczykHeyns, MarcMarcHeynsMeuris, MarcMarcMeurisVan Hemmen, J.L.J.L.Van HemmenKeuning, WytzeWytzeKeuningKessels, W.M.M.W.M.M.Kessels2021-10-182021-10-1820090013-4651https://imec-publications.be/handle/20.500.12860/16240Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substratesJournal article