Determination of thickness and density of a wet multilayer polymer system with sub-nanometer resolution by means of a dual polarization silicon-on-insulator microring

Hoste, Jan-WillemJan-WillemHosteDe Geest, BrunoBrunoDe GeestBienstman, PeterPeterBienstman2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25394Determination of thickness and density of a wet multilayer polymer system with sub-nanometer resolution by means of a dual polarization silicon-on-insulator microringProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2204235