Van Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetNyns, LauraLauraNynsRichard, OlivierOlivierRichardLehnen, PeerPeerLehnenSwerts, JohanJohanSwertsDe Gendt, StefanStefanDe Gendt2021-10-172021-10-1720080734-2101https://imec-publications.be/handle/20.500.12860/14638Silicate formation and thermal stability of rare earth oxides as high-k gate dielectricsJournal article