Ronse, KurtKurtRonseGoethals, MiekeMiekeGoethalsVandenberghe, GeertGeertVandenbergheMaenhoudt, MireilleMireilleMaenhoudt2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3779Recent trends and progress in DUV lithographyProceedings paper