High resolution electrical characterization of advanced CMOS devices

Eyben, PierrePierreEybenPetry, JasmineJasminePetryJanssens, TomTomJanssensFukutome, H.H.FukutomeVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8897High resolution electrical characterization of advanced CMOS devicesProceedings paper