Meuris, MarcMarcMeurisDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtKubicek, StefanStefanKubicekVerheyen, PeterPeterVerheyenDe Jaeger, BriceBriceDe JaegerVan Steenbergen, JanJanVan SteenbergenWinderickx, GillisGillisWinderickxVan Moorhem, ElsElsVan MoorhemPuurunen, R.R.PuurunenBrijs, BertBertBrijsCaymax, MattyMattyCaymaxConard, ThierryThierryConardRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstZhao, ChaoChaoZhaoDe Gendt, StefanStefanDe GendtSchram, TomTomSchramChiarella, ThomasThomasChiarellaOnsia, BartBartOnsiaTeerlinck, IITeerlinckHoussa, MichelMichelHoussaMertens, PaulPaulMertensRaskin, G.G.RaskinMijlemans, P.P.MijlemansBiesemans, SergeSergeBiesemansHeyns, MarcMarcHeyns2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10889The future of high-k on pure germanium and its importance for Ge CMOSJournal article