Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology

Fenger, GermainGermainFengerBurbine, AndrewAndrewBurbineTorres, J. AndresJ. AndresTorresMa, YuanshengYuanshengMaGranik, YuriYuriGranikKrasnova, PolinaPolinaKrasnovaVandenberghe, GeertGeertVandenbergheGronheid, RoelRoelGronheidBekaert, JoostJoostBekaert2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23811Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrologyProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1916444