Rochus, VeroniqueVeroniqueRochusJansen, RoelofRoelofJansenGoyvaerts, JeroenJeroenGoyvaertsNeutens, PieterPieterNeutensO'Callaghan, JohnJohnO'CallaghanRottenberg, XavierXavierRottenberg2021-10-262021-10-2620180960-1317https://imec-publications.be/handle/20.500.12860/31663Fast analytical model of MZI micro-opto-mechanical pressure sensorJournal articlehttp://iopscience.iop.org/article/10.1088/1361-6439/aab461/pdf