De Smedt, FrankFrankDe SmedtVinckier, ChrisChrisVinckierDe Gendt, StefanStefanDe GendtCornelissen, IngridIngridCornelissenHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3372A mechanism for the silicon oxide growth by ozonated solutionsMeeting abstract