Low-frequency noise in nFinFETs of different dimensions processed in strained and non-strained SOI wafers

Lukyanchikova, N.N.LukyanchikovaGarbar, N.N.GarbarKudina, V.V.KudinaSmolanka, A.A.SmolankaSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-172021-10-1720081560-8034https://imec-publications.be/handle/20.500.12860/14081Low-frequency noise in nFinFETs of different dimensions processed in strained and non-strained SOI wafersJournal article