O'Sullivan, BarryBarryO'SullivanHaslinger, MichaelMichaelHaslingerSingh, SukhvinderSukhvinderSinghBearda, TwanTwanBeardaDebucquoy, MaartenMaartenDebucquoySzlufcik, JozefJozefSzlufcik2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25714Ozone based processing: impact on high efficiency Interdigitated back contact solar cellsProceedings paper10.4028/www.scientific.net/SSP.219.312