Zhong, KuoKuoZhongLi, JiaqiJiaqiLiVancleuvenbergen, StijnStijnVancleuvenbergenClays, KoenKoenClays2021-10-232021-10-2320162040-3364https://imec-publications.be/handle/20.500.12860/27671Direction fabrication of complex 3D hierarchical nanostructures by reactive ion etching of hollow sphere colloidal crystalsJournal articlehttp://pubs.rsc.org/en/content/articlelanding/2016/nr/c6nr05365c#!divAbstract