Low-resistance titanium contacts and thermally unstable nickel germanide contacts on p-type germanium

Yu, HaoHaoYuSchaekers, MarcMarcSchaekersSchram, TomTomSchramAderhold, WolfgangWolfgangAderholdMayur, AbilashAbilashMayurMitard, JeromeJeromeMitardWitters, LiesbethLiesbethWittersBarla, KathyKathyBarlaCollaert, NadineNadineCollaertHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronTheanDe Meyer, KristinKristinDe Meyer2021-10-232021-10-2320160741-3106https://imec-publications.be/handle/20.500.12860/27643Low-resistance titanium contacts and thermally unstable nickel germanide contacts on p-type germaniumJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7397910&newsearch=true&queryText=Low-Resistance%20Titanium%20Contacts