Low temperature large area pulsed microwave linear antennas PECVD of nanocrystalline diamond films

Nesladek, MilosMilosNesladekFendrych, F.F.FendrychTaylor, A.A.TaylorLiehr, M.M.Liehr2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21192Low temperature large area pulsed microwave linear antennas PECVD of nanocrystalline diamond filmsProceedings paper