Inoue, FumihiroFumihiroInoueDerakhshandeh, JaberJaberDerakhshandehMoeller, BertholdBertholdMoellerGokita, YoheiYoheiGokitaDuval, FabriceFabriceDuvalBex, PieterPieterBexCapuz, GiovanniGiovanniCapuzRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerSleeckx, ErikErikSleeckxBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30937Polymer and bump planarization for fine pitch micro-bump stackingMeeting abstracthttp://ma.ecsdl.org/content/MA2018-02/33/1135.abstract