Hiblot, GaspardGaspardHiblotArimura, HiroakiHiroakiArimuraWitters, LiesbethLiesbethWittersChiu, EddieEddieChiuLiu, YefanYefanLiuMitard, JeromeJeromeMitardHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertVan der Plas, GeertGeertVan der Plas2021-10-272021-10-2720191530-4388https://imec-publications.be/handle/20.500.12860/33156Observation of plasma-induced damage in bulk germanium p-type FinFET devices and curing in high-pressure annealJournal articlehttps://ieeexplore.ieee.org/document/8672823