Peter, AntonyAntonyPeterCarbonell, LaureLaureCarbonellSchaekers, MarcMarcSchaekersOpsomer, KarlKarlOpsomerAdelmann, ChristophChristophAdelmannRichard, OlivierOlivierRichardBender, HugoHugoBenderFranquet, AlexisAlexisFranquetMeersschaut, JohanJohanMeersschautWen, Liang GongLiang GongWenTokei, ZsoltZsoltTokeiVan Elshocht, SvenSvenVan Elshocht2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/24377Low temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applicationsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931713005777