Selective epitaxial growth: trends in a modern transistor device fabrication

Hikavyy, AndriyAndriyHikavyyVanherle, WendyWendyVanherleDekoster, JohanJohanDekosterWitters, LiesbethLiesbethWittersHoffmann, ThomasThomasHoffmannLoo, RogerRogerLoo2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19079Selective epitaxial growth: trends in a modern transistor device fabricationProceedings paperhttp://www.ecsdl.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=ECSTF8000034000001000455000001&idtype=cvips