Evaluation of roughness transfer from Litho to Etch using CD-SEM

Tanaka, MotohiroMotohiroTanakaIshimoto, ToruToruIshimotoKazumi, H.H.KazumiCheng, ShauneeShauneeCheng2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21588Evaluation of roughness transfer from Litho to Etch using CD-SEMProceedings paper