Vereecke, GuyGuyVereeckeVeltens, J.J.VeltensXu, KaidongKaidongXuEitoku, A.A.EitokuSano, Ken-IchiKen-IchiSanoArnauts, SophiaSophiaArnautsKenis, KarineKarineKenisSnow, J.J.SnowVinckier, ChrisChrisVinckierMertens, PaulPaulMertens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14739Aging phenomena in the removal of nano-particles from Si wafersProceedings paper