Sun, Y.Y.Sunvan Vliet, F. E.F. E.van VlietTauritz, J. L.J. L.TauritzBaets, RoelRoelBaets2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1517Monolithic narrow-band active inductors using suspended membrane passive components on silicon substrateProceedings paper