Active dopant profiling of advanced semiconductor devices using scanning spreading resistance microscopy

Mody, JayJayModyEyben, PierrePierreEybenPolspoel, WouterWouterPolspoelSchulze, AndreasAndreasSchulzeNazir, AftabAftabNazirVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14180Active dopant profiling of advanced semiconductor devices using scanning spreading resistance microscopyMeeting abstract