Silicon microfilter device fabrication and characterization for diverse microfluidics applications

Majeed, BivraghBivraghMajeedZhang, LeiLeiZhangSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanSoussan, PhilippePhilippeSoussanFiorini, PaoloPaoloFiorini2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19358Silicon microfilter device fabrication and characterization for diverse microfluidics applicationsProceedings paper