Ozonated HF applications in a spray processing tool

Claes, M.M.ClaesRöhr, ErikaErikaRöhrDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsLagrange, SébastienSébastienLagrangeBergman, E.E.Bergman2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5145Ozonated HF applications in a spray processing toolMeeting abstract