Achievements and challenges for the electrical performance of MOSFETs with high-k gate dielectrics

Groeseneken, GuidoGuidoGroesenekenPantisano, LuigiLuigiPantisanoRagnarsson, Lars-AkeLars-AkeRagnarssonDegraeve, RobinRobinDegraeveHoussa, MichelMichelHoussaKauerauf, ThomasThomasKaueraufRoussel, PhilippePhilippeRousselDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8985Achievements and challenges for the electrical performance of MOSFETs with high-k gate dielectricsProceedings paper