Vandervorst, WilfriedWilfriedVandervorstConard, ThierryThierryConardGiangrandi, SimoneSimoneGiangrandiBrijs, BertBertBrijsBergmaier, A.A.BergmaierKimura, K.K.Kimuravan den Berg, J.A.J.A.van den BergWerner, M.M.Werner2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13124Quantitative analysis of thin dielectrica with ultra high resolution ERD, MEIS and RBSMeeting abstract