Bearda, TwanTwanBeardaMertens, PaulPaulMertensWoerlee, P. H.P. H.WoerleeWallinga, H.H.WallingaSchmolke, R.R.SchmolkeHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6000Modelling of crystal originated particles and their impact on gate oxide integrityProceedings paper