Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films

Schwitters, M.M.SchwittersEveraert, Jean-LucJean-LucEveraertLisoni, JuditJuditLisoniParaschiv, VasileVasileParaschivGoux, LudovicLudovicGouxWouters, DirkDirkWoutersMonchoix, H.H.MonchoixCaputa, ConcettaConcettaCaputaZambrano, R.R.Zambrano2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9577Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 filmsOral presentation