Hybrid 14nm FinFET - Silicon photonics technology for low-power Tb/s/mm2 optical I/O

Rakowski, MichalMichalRakowskiBan, YoojinYoojinBanDe Heyn, PeterPeterDe HeynPantano, NicolasNicolasPantanoSnyder, BradBradSnyderBalakrishnan, SadhishkumarSadhishkumarBalakrishnanVan Huylenbroeck, StefaanStefaanVan HuylenbroeckBogaerts, LieveLieveBogaertsDemeurisse, CarolineCarolineDemeurisseInoue, FumihiroFumihiroInoueRebibis, Kenneth JuneKenneth JuneRebibisNolmans, PhilipPhilipNolmansSun, XiaoXiaoSunBex, PieterPieterBexSrinivasan, AshwynAshwynSrinivasanDe Coster, JeroenJeroenDe CosterLardenois, SebastienSebastienLardenoisMiller, AndyAndyMillerAbsil, PhilippePhilippeAbsilVerheyen, PeterPeterVerheyenVelenis, DimitriosDimitriosVelenisPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan Campenhout2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31610Hybrid 14nm FinFET - Silicon photonics technology for low-power Tb/s/mm2 optical I/OProceedings paperhttps://ieeexplore.ieee.org/document/8510668