A novel method to determine the mechanical resonance frequency, quality factor and charging of electrostatically actuated micromechanical resonators

Kalicinski, StanislawStanislawKalicinski2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12380A novel method to determine the mechanical resonance frequency, quality factor and charging of electrostatically actuated micromechanical resonatorsOral presentation