Fabrication and characterization of Si and hetero-junction tunnel field effect transistors

Claeys, CorCorClaeysLeonelli, DanieleDanieleLeonelliRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenVerhulst, AnneAnneVerhulstHeyns, MarcMarcHeynsGroeseneken, GuidoGuidoGroesenekenDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15109Fabrication and characterization of Si and hetero-junction tunnel field effect transistorsOral presentation