An all-solid-state 3D thin-film Li-ion battery fabricated on a silicon micropillar array

Mees, MaartenMaartenMeesLabyedh, NouhaNouhaLabyedhPut, BrechtBrechtPutMoitzheim, SebastienSebastienMoitzheimSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezCreatore, AdrianaAdrianaCreatoreKessels, ErwinErwinKesselsVereecken, PhilippePhilippeVereecken2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28954An all-solid-state 3D thin-film Li-ion battery fabricated on a silicon micropillar arrayProceedings paperhttp://euromat2017.fems.eu/articlefiles/E2_ORAL_PLANNING_final.pdf