Compact thermal modeling of hot spots in advanced 3D-stacked structures

Torregiani, CristinaCristinaTorregianiOprins, HermanHermanOprinsVandevelde, BartBartVandeveldeBeyne, EricEricBeyneDe Wolf, IngridIngridDe Wolf2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16321Compact thermal modeling of hot spots in advanced 3D-stacked structuresProceedings paper